ANNEALSYS ( is a SME based in Montpellier, France. Annealsys designs and manufactures Rapid Thermal Processing and Chemical Vapour Deposition systems dedicated to research and development. Annealsys was founded in 2004, is privately owned and presently employs 10 persons. Since 2006 Annealsys has developed a new range of machines with multi process capability for DLI-MOCVD, ALD and RTP in the same process chamber like in the MC050 machine. The direct liquid injection (DLI) vaporization system provides the capability to use the widest range of organometallic precursors for MOCVD and ALD processes. Annealsys is providing systems for contact annealing and oxidation of silicon carbide. The company is currently developing a high temperature furnace for implantation annealing of silicon carbide wafers.